School on Micro- and Nano-technologies
September 21-22-23
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The School will be held both REMOTELY and IN ATTENDANCE
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Chairs: Vittorio MORANDI, CNR-IMM & Lorenza FERRARIO, FBK |
Co-organized with |
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The course is dedicated to Master Degree and Ph.D students, as well as to scientists working in the wide field of micro- and nano-technology, offering the opportunity to learn about fundamentals on processes, devices fabrication and characterization processes, with attention to both planar and 3D technologies.
Besides the lectures dedicated to single technology steps, building blocks of the silicon-based micro- and nano-fabrication technologies, there will be sessions dedicated to devices application areas.
The School will be completed with live sessions from cleanrooms to practically show some of the fundamental silicon processing steps.
NEW IN THE 2022 EDITION, A RESIDENTIAL SESSION BY FBK
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Wednesday 21 September |
09:00 - 09:15
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Welcome and introduction Vittorio MORANDI CNR-IMM, Bologna |
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09:15 - 09:45
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Cleanroom, introduction to the functioning Lorenza FERRARIO FBK |
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09:45 - 10:30
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Ionic implantation Antonino PICCIOTTO FBK |
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break |
11:30 - 12:15
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Depostion techniques 1 Riccardo BERTACCO Polytechnic University of Milan - PoliFAB |
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12:15 - 13:00
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Depostion techniques 2 Claudio SOMASCHINI Polytechnic University of Milan - PoliFAB
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light lunch |
14:00 - 14:45 |
Plasma/etching 1 Fulvio MANCARELLA CNR-IMM
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14:45 - 15:30 |
Plasma/etching 2 Fulvio MANCARELLA CNR-IMM
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15:30 - 17:00 |
Live from FBK facility, Trento |
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Thursday 22 September
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09:00 - 09:45
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Lithography 1 Massimo CUSCUNA' CNR NANOTEC |
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09:45 - 10:30
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Lithography 2 Massimo CUSCUNÀ CNR NANOTEC |
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break |
11:30 - 12:15
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Self-assembling lithography for nanoscale metrology Luca BOARINO INRIM |
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12:15 - 13:00
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Metrology in Nanotechnologies Davide CALONICO INRIM |
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light lunch |
14:45 - 15:30 |
Two Photon Polymerization and Additive Manufacturing Valentina BERTANA Polytechnic University of Turin |
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15:30 - 17:00 |
Live from FBK facility, Trento |
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Friday 23 September |
09:00 - 09:45
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Nanostructured Superconductors for Quantum Technologies Enrico EMANUELE INRIM |
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09:45 - 10:30 |
Quantum and nanotechnologies applied to time and frequency metrology Giulia APRILE INRIM |
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break |
11:30 - 12:15
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Microfluidics and biosensors Simone Luigi MARASSO CNR-IMEM |
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12:15 - 13:00 |
BCD - story, application and process technology Fabrizio TOIA STMicroelectronics |
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light lunch
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14:30 - 15:30 |
Live from FBK facility, Trento |
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